引用本文:刘培， 王振玉， 柯培玲， 李晓伟， 吴晓春， 汪爱英.磁控溅射-热处理两步法制备Cr2AlC涂层及力学性能[J].中国表面工程,2016,29(1):64~72
LIU Pei, WANG Zhenyu, KE Peiling, LI Xiaowei, WU Xiaochun, WANG Aiying.Mechanical Properties of Cr2AlC Coatings Prepared by DC Magnetron Sputtering and Heat Treatment[J].China Surface Engineering,2016,29(1):64~72
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磁控溅射-热处理两步法制备Cr2AlC涂层及力学性能
刘培， 王振玉， 柯培玲， 李晓伟， 吴晓春， 汪爱英1,2
1.上海大学 材料科学与工程学院, 上海200072;2.中国科学院宁波材料技术与工程研究所 a. 中国科学院海洋新材料与应用技术重点实验室， b. 浙江省海洋材料与防护技术重点实验室， 浙江 宁波 315201
摘要:
Cr2AlC属于三元层状化合物MAX相，其兼具金属和陶瓷的综合性能，如金属的导热、导电、可加工性，陶瓷的抗氧化、耐腐蚀等性能。利用直流磁控溅射技术和后续退火工艺在高速钢基体上制备了Cr2AlC涂层，采用XRD、SEM等研究了气体流量及热处理工艺对涂层成分和物相组成的影响。结果表明：气体流量和退火温度对Cr2AlC相的形成至关重要，气体流量比过大和退火温度过高均不利于Cr2AlC的形成。不同气体流量下沉积态涂层主要由CrC化合物、非晶或者纳米晶等组成，均没有发现Cr2AlC相；涂层经750 ℃退火后不同气体流量比涂层均有一定量Cr2AlC相形成；且Cr2AlC相形成的温度范围随CH4/Ar气体流量比增加而变窄。含Cr2AlC MAX相涂层的硬度为10.6~17.6 GPa，弹性模量为255.3~323.4 GPa。
关键词:  直流磁控溅射  Cr2AlC涂层  高温退火  力学性能  相结构
DOI：10.11933/j.issn.1007-9289.2016.01.010
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Mechanical Properties of Cr2AlC Coatings Prepared by DC Magnetron Sputtering and Heat Treatment
LIU Pei, WANG Zhenyu, KE Peiling, LI Xiaowei, WU Xiaochun, WANG Aiying1,2
1. School of Materials Science and Engineering, Shanghai University, Shanghai 200072;2a.Key Laboratory of Marine Materials and Related Technologies, 2b.Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, Zhejiang
Abstract:
Ternary layered carbide Cr2AlC is a typical MAX phase. This compound possesses a unique combination of the merits of both metals and ceramics, such as good thermal conductivity, conductive, easy machinability, good corrosion and excellent oxidation resistance.Cr2AlC coatings were prepared on high speed steel substrate by DC magnetron sputtering method combined with heat posttreatment in this study. The influence of gas flow rates and heat treatmenttemperature on the composition and phase in the coatings were also characterized with XRD and SEM. The results show that: the gas flow rate and heat treatment temperature play key roles on the formation of Cr2AlC MAX phase.The formation of Cr2AlC phase is suppressed by the increment of CH4/Ar gas flow rates and the enhancement of annealing temperature. The asdeposited coatings mainly consist of CrC compound and amorphous, however, Cr2AlC phases can be acquired after being annealed at 750 ℃ for coatings with different gas flow rate. The temperature range of Cr2AlC phase formation can decrease with increasing CH4/Ar flow rate ratio. The nanohardness and elastic modulus of coatings contain Cr2AlC MAX phase are 10.617.6 GPa and 255.3323.4 GPa.
Key words:  DC magnetron sputtering  Cr2AlC coating  annealing  mechanical properties  phase structure
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