引用本文:刘广桥， 董丽梅， 张俊彦.类富勒烯/非晶多层碳膜的制备及性能[J].中国表面工程,2016,29(1):51~57
LIU Guangqiao, DONG Limei, ZHANG Junyan.Preparation and Properties of Fullerene-like/Amorphous Multilayer Carbon-based Film[J].China Surface Engineering,2016,29(1):51~57
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类富勒烯/非晶多层碳膜的制备及性能
刘广桥， 董丽梅， 张俊彦1,2
1. 兰州城市学院 培黎石油工程学院， 兰州730070;2. 中国科学院兰州化学物理研究所 固体润滑国家重点实验室， 兰州 730000
摘要:
针对碳基薄膜存在的高应力问题，利用单极脉冲等离子体增强化学气相沉积技术在单晶硅衬底上制备了含氢类富勒烯/非晶层交替构成的类金刚石多层膜。采用高分辨透射电子显微镜和激光拉曼光谱仪分析了多层膜的结构特征；用X射线光电子能谱分析了薄膜的化学键状态；用纳米压痕仪测定了薄膜的硬度和弹性模量；在CSM往复式摩擦磨损试验机上考察了薄膜在大气下的摩擦学性能，同时比较了多层膜与非晶、类富勒烯薄膜的力学性能和摩擦磨损性能。结果表明：多层膜的硬度高于非晶和类富勒烯单层薄膜，达到28.78 GPa；在大气环境下与Si3N4球对摩时平均摩擦因数略低于类富勒烯单层膜，耐磨性明显优于单层非晶和类富勒烯薄膜。
关键词:  类富勒烯  多层碳膜  摩擦磨损性能  力学性能
DOI：10.11933/j.issn.1007-9289.2016.01.008
分类号:
基金项目:
Preparation and Properties of Fullerene-like/Amorphous Multilayer Carbon-based Film
LIU Guangqiao, DONG Limei, ZHANG Junyan1,2
1. Bailie School of Petroleum Engineering, Lanzhou City University, Lanzhou 730070;2. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000
Abstract:
In order to solve the carbonbased films with high stress, the hydrogenated fullerenelike/amorphous multilayered structure carbon films were alternately deposited on Si (100) substrates by unipolar plasma enhanced chemical vapor deposition technology. High resolution transmission electron microscopy and laser Raman spectroscopy were carried out to study the microstructure of the asdeposited multilayer film. Xray photoelectron spectroscope was performed to analyze the chemical bonding state of the film. Nanoindentation measurement was used to probe the hardness and elastic modulus and the tribological properties of the film were evaluated on a CSM commercial reciprocating ballondisk tribometer under ambient conditions. The results show that the hardness of the multilayer film is about 28.78 GPa, higher than the amorphous and fullerenelike single structure films. The friction coefficient of multilayer film sliding against Si3N4 ball is slightly lower than that of the fullerenelike single structure film, while the wear resistance is better than that of the amorphous and fullerenelike single structure film.
Key words:  fullerene-like  multilayer carbonbased film  tribological performance  mechanical properties
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