引用本文:聂霞， 冒守栋， 晏敏胜， 郑必长， 李金龙， 宋振纶.磁控溅射Al-Ti合金薄膜的结构与性能变化[J].中国表面工程,2014,27(4):95~99
NIE Xia, MAO Shoudong, YAN Minsheng, ZHENG Bizhang, LI Jinlong, SONG Zhenlun.Structure and Properties Variation of Al-Ti Alloy Coatings Prepared by Magnetron Sputtering[J].China Surface Engineering,2014,27(4):95~99
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磁控溅射Al-Ti合金薄膜的结构与性能变化
聂霞， 冒守栋， 晏敏胜， 郑必长， 李金龙， 宋振纶1,2
1. 中国科学院宁波材料技术与工程研究所 a. 海洋新材料与应用技术重点实验室， b. 浙江省海洋材料与防护技术重点实验室， 浙江 宁波 315201;2. 昆明理工大学， 材料科学与工程学院， 昆明 650093
摘要:
采用磁控溅射共沉积法制备AlTi合金薄膜，利用扫描电子显微镜（SEM）、透射电子显微镜（TEM）、X射线衍射仪（XRD）以及纳米压痕仪等研究了薄膜成分、薄膜结构、薄膜形貌与薄膜力学性能之间的相互关系。结果表明： 当薄膜钛(Ti)含量低于26%时，薄膜为晶态固溶体(fcc Al(Ti))；钛含量为32%时，薄膜为固溶体非晶混合相；钛含量介于35%~62%时，薄膜为非晶；钛含量为73%时，薄膜为非晶固溶体混合相；钛含量高于76%时，薄膜为晶态固溶体(hcp Ti(Al))；AlTi薄膜的非晶区间为32%~73%Ti。同时非晶薄膜的内部结构较晶体更为致密。非晶薄膜的硬度和模量较晶体更高。这表明共沉积法可快速研究AlTi薄膜的结构、形貌及性能随薄膜成分的变化，并获取薄膜的非晶区间。
关键词:  磁控溅射  AlTi薄膜  固溶体  非晶
DOI：10.3969/j.issn.1007-9289.2014.04.015
分类号:
基金项目:
Structure and Properties Variation of Al-Ti Alloy Coatings Prepared by Magnetron Sputtering
NIE Xia, MAO Shoudong, YAN Minsheng, ZHENG Bizhang, LI Jinlong, SONG Zhenlun1,2
1a. Key Laboratory of Marine Materials and Related Technologies, 1b. Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, Zhejiang;2. Faculty of Materials Science and Engineering, Kunming University of Science and Technology, Kunming 650093
Abstract:
AlTi alloy coatings were prepared by codeposition from two separate targets. The composition, structure, morphology, mechanical properties of the AlTi coatings and the relationships were studied by scanning electron microscope（SEM），transmission electron microscope（TEM），Xray diffraction（XRD）and nanoindentation tester. The results show that the Al26%Ti and Al76%Ti coatings are solid solutions (fcc Al(Ti) and hcp Ti(Al) respectively). The coatings with Ti contents of 35%62% are amorphous. The Al32%Ti and Al73%Ti coatings are mixed phases of amorphous and solid solutions. The amorphous range of the AlTi alloys is 32%73%Ti. The morphologies of the amorphous alloys are denser, and the mechanical properties of the amorphous alloys are higher than those of the solid solutions. It indicates that the codeposition method can study the variations of the structure, morphologies, mechanical properties of the AlTi alloys with the composition rapidly, and obtain the amorphous range of the coatings.
Key words:  magnetron sputtering  AlTi coating  solid solution  amorphous
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