引用本文:欧玉静, 王永富, 张俊彦.水分子诱导类金刚石薄膜表面的变化[J].中国表面工程,2013,26(6):48~51
OU Yujing, WANG Yongfu, ZHANG Junyan.Surface Changes of Diamond-like Carbon Films Induced by Water Molecules[J].China Surface Engineering,2013,26(6):48~51
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水分子诱导类金刚石薄膜表面的变化
欧玉静, 王永富, 张俊彦1,2
1.兰州理工大学 石油化工学院, 兰州 730050;2.中国科学院兰州化学物理研究所 固体润滑国家重点实验室, 兰州 730000
摘要:
利用等离子体增强化学气相沉积技术在单晶硅表面制备了类金刚石(DLC)薄膜，并将其分别浸泡在经磁场处理和未经磁场处理的去离子水中。利用X射线光电子能谱仪、原位纳米力学测试系统和高速摩擦磨损测试仪分析和比较在水和磁化水中浸泡后DLC薄膜表面的变化情况。结果表明：磁场作用将改变经过DLC薄膜表面微孔或缺陷渗进薄膜内的水分子个数，进而诱导DLC薄膜表面发生变化。在含水环境中，比如液体水中，水分子参与反应并诱导C=C键朝向CC或CH键转化，并且氢原子将进入薄膜内中和膜内自由基，进而导致其硬度，摩擦因数升高。
关键词:  类金刚石薄膜  水分子  表面化学
DOI：10.3969/j.issn.1007-9289.2013.06.008
分类号:
基金项目:
Surface Changes of Diamond-like Carbon Films Induced by Water Molecules
OU Yujing, WANG Yongfu, ZHANG Junyan1,2
1.School of Petrochemical Engineering, Lanzhou University of Technology, Lanzhou 730050;2.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000
Abstract:
Diamond-like carbon films were successfully deposited on Si substrate by plasma enhanced chemical vapor deposition, and immersed in deionized water with or without magnetic fields. Soaked surfaces of the films in deionized water with or without magnetic fields were investigated by Xray photoelectron spectroscopy (XPS), nanoindentation and tribometer. It is found that the magnetic fields increase the number of water molecules penetrating into DLC films, resulting in the surface changes of the films. When water molecules exist, the conversion from C=C bonds to CH bonds is induced, and H atoms enter into films, and neutralize free radicals, resulting the increase of hardness and friction coefficient.
Key words:  diamondlike carbon (DLC) films  water molecules  surface chemistry
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