| 引用本文: | 魏利，张斌，曹忠跃，张俊彦.氟含量对类金刚石薄膜结构及摩擦学性能的影响[J].中国表面工程,2013,26(2):66~71 |
| WEI Li, ZHANG Bin, CAO Zhong-yue, ZHANG Jun-yan.Effect of Fluorine Content on Structure and Tribological Properties of Diamond-like Carbon Films[J].China Surface Engineering,2013,26(2):66~71 |
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| 摘要: |
| 采用直流等离子体沉积的方法制备了具有不同氟含量的类金刚石薄膜。并利用多功能X射线光电子能谱仪（XPS）、拉曼光谱仪、纳米压痕仪、应力测试仪和摩擦磨损试验机等手段分析和研究了含氟类金刚石薄膜的结构、力学性能以及摩擦学性能，并利用场发射扫描电镜（SEM）观察了薄膜断面形貌。结果表明：所制备薄膜的力学性能和摩擦学性能均受到薄膜中氟含量的影响，当F含量（原子数分数）为5.92% 时，薄膜显示了优异的力学性能及摩擦学性能，硬度值高达21 GPa，压应力低至0.75 GPa，摩擦因数为0.013，磨损率为9×10-19 m3/(N·m)。 |
| 关键词: 氟化类金刚石 等离子体沉积 摩擦性能 |
| DOI： |
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| 基金项目:国家基础研究发展计划(973计划)(2013CB632300) |
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| Effect of Fluorine Content on Structure and Tribological Properties of Diamond-like Carbon Films |
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WEI Li, ZHANG Bin, CAO Zhong-yue, ZHANG Jun-yan
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State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000
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| Abstract: |
| The films with different fluorine content were deposited on silicon P(100) wafer by chemical vapor deposition. The structure, mechanical and tribological properties of films were systemically investigated by Xray photoelectron spectroscopic （XPS）, Raman spectra, nanoindenter and tribotester. The crosssectional morphologies of the films were observed by scanning electron microscopy (SEM). The results showed that the structure and tribological properties of the film affected by fluorine content, the film with 5.92% fluorine exhibited excellent mechanical and tribological properties, with the highest hardness about 21 GPa, the lowest internal stress about 0.75 GPa , the friction coefficient about 0.013 and the low wear rate about 9×10-19 m3/(N·m). |
| Key words: fluorinated diamondlike carbon film plasma deposition tribological property |
