引用本文:李灿民, 魏荣华.等离子增强磁控溅射沉积Ti(Al)基纳米复合涂层在铸铝模具上的应用[J].中国表面工程,2012,25(2):1~7
LI Can-min, WEI Rong-hua.Ti(Al) Based Nanocomposite Coating Produced by Plasma Enhanced Magnetron Sputtering Applied in Aluminum Die Casting[J].China Surface Engineering,2012,25(2):1~7
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等离子增强磁控溅射沉积Ti(Al)基纳米复合涂层在铸铝模具上的应用
李灿民, 魏荣华1,2,3
1. 合肥永信等离子技术有限公司, 合肥 230061;2. 西南研究院, 美国 德克萨斯州 圣安东尼奥 78238;3. 合肥工业大学, 合肥 230009
摘要:
采用等离子增强磁控溅射技术在H13钢表面制备了TiSiCN、TiSiCON、TiAlSiCN、TiAlSiCON纳米复合涂层,使用扫描电子显微镜,原子力显微镜,X射线衍射仪等研究了涂层的组织和性能,主要讨论了Al、O元素对涂层的显微组织、表面能和高温稳定性的影响。试验结果显示:O元素的加入使涂层致密度降低、表面变得粗糙且产生了少量的柱状组织,但它的加入可以降低涂层的表面能;Al元素的加入能显著降低涂层的表面能,并能提高涂层的耐高温性能。这是因为涂层在高温下没有发生分解,且Al元素在高温下形成致密的氧化膜,阻止了涂层进一步氧化。低表面能、好的耐高温性能是便于铸铝模具脱模,延长其工作寿命最有效的性能指标。
关键词:  等离子增强磁控溅射  纳米复合涂层  显微组织  表面能  高温稳定性  铸铝模具
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Ti(Al) Based Nanocomposite Coating Produced by Plasma Enhanced Magnetron Sputtering Applied in Aluminum Die Casting
LI Can-min, WEI Rong-hua1,2,3
1. Hefei Yongxin Plasma Technology Co. Ltd, Hefei 230001;2. Southwest Research Institute, San Antonio, Texas 78238, USA;3. Hefei University of Technology, Hefei 230009
Abstract:
Plasma enhanced magnetron sputtering (PEMS) method was used to produce TiSiCN, TiSiCON, TiAlSiCN, TiAlSiCON nanocomposite coatings deposited on H13 steel. Scanning electron microscope(SEM),atomic force microscope(AFM),Xray diffraction(XRD) were used to analyze the microstructure and properties of the coatings. The influence of oxygen and aluminum on the microstructure, surface energy and hightemperature stability of the coatings was studied. The results show that oxygencontained coatings display slightly loose microstructure, rougher surface with a little columnar structure,but oxygen could lower the surface energy of the coatings. Aluminum doped can reduce the surface energy and improve the hightemperature stability of the coating, because the Ti(Al) based nanocomposite coating isn’t decomposed and its surface can form a dense oxidation layer which can prevent further oxidation under high temperature. Low surface energy and good high temperature stability are the best performance indexes which can easy to demould and extend the life of the aluminum die casting.
Key words:  PEMS  nanocomposite coating  microstructure  surface energy  hightemperature stability  aluminum die casting
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