引用本文:吕艳红，孔庆花，吉 利，李红轩，刘晓红，陈建敏，周惠娣.氮气流量对中频非平衡反应磁控溅射制备CrAlN薄膜性能的影响[J].中国表面工程,2011,24(4):7~12
LV Yan–hong, KONG Qing–hua, JI Li, LI Hong–xuan, LIU Xiao–hong, CHEN Jian–min, ZHOU Hui–di.Influence of Nitrogen Flows on Properties of CrAlN Film Prepared by Mid–frequency Unbalanced Magnetron Sputtering[J].China Surface Engineering,2011,24(4):7~12
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氮气流量对中频非平衡反应磁控溅射制备CrAlN薄膜性能的影响
吕艳红，孔庆花，吉 利，李红轩，刘晓红，陈建敏，周惠娣1,2
1. 中国科学院兰州化学物理研究所 固体润滑国家重点实验室, 兰州 730000;2. 中国科学院 研究生院, 北京 100049
摘要:
采用中频非平衡反应磁控溅射技术制备CrAlN薄膜，研究了氮气分压对CrAlN薄膜的沉积速率、薄膜成分、微观结构、机械性能和耐腐蚀性能的影响，并与CrN薄膜的性能进行了比较。研究表明，相比较CrN薄膜而言，CrAlN薄膜的硬度高，结构致密，耐腐蚀性好。随着氮气流量的升高，CrAlN薄膜沉积速率降低，Cr/Al比率升高；薄膜中CrN(200)衍射峰强度逐渐增强，六方结构的AlN相逐渐消失； 薄膜的粗糙度由39 nm 降低至10 nm，并且腐蚀电位升高，耐腐性增强。当氮气流量为53 mL/min 时，CrAlN薄膜具有最佳的硬度和优良的耐腐蚀性能。
关键词:  磁控溅射  CrAlN 薄膜  微观结构  硬度  腐蚀
DOI：
分类号:
基金项目:国家自然科学基金(50705093)；创新群体基金(50421502)
Influence of Nitrogen Flows on Properties of CrAlN Film Prepared by Mid–frequency Unbalanced Magnetron Sputtering
LV Yan–hong, KONG Qing–hua, JI Li, LI Hong–xuan, LIU Xiao–hong, CHEN Jian–min, ZHOU Hui–di1,2
1. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000;2. Graduate University of the Chinese Academy of Sciences, Beijing 100049
Abstract:
CrAlN films were deposited by mid–frequency unbalanced magnetron sputtering in order to study the deposition rate, composition, structure, mechanical features and corrosion resistance as a function of nitrogen flow compared with CrN film. The results show CrAlN films present higher hardness value, denser structure and better corrosion resistance as compared with CrN film. With the nitrogen flow increasing, the deposition rate of CrAlN films is decreasing and Cr/Al ratio increasing, the relative intensity of the (200) peak increases and hexagonal crystalline AlN disappears. In addition, the roughness of CrAlN film decreases from 39 nm to 10 nm and the corrosion potential increases. When the nitrogen flow comes to 53 mL/min, the hardness of CrAlN film reaches a maximum value and the film shows the best excellent corrosion resistance.
Key words:  magnetron sputtering  CrAlN film  microstructre  hardness  corrosion
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