引用本文:胡芳，代明江，林松盛.微喷砂预处理对硬质合金上沉积类金刚石薄膜结构和性能的影响[J].中国表面工程,2011,24(3):53~58
HU Fang, DAI Ming-jiang, LIN Song-sheng.Effects on Structure and Performance of Diamondlike Carbon Films deposited on Cemented Carbide by Microblasting Pretreatment[J].China Surface Engineering,2011,24(3):53~58
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微喷砂预处理对硬质合金上沉积类金刚石薄膜结构和性能的影响
胡芳，代明江，林松盛
广东省工业技术研究院 广州有色金属研究院， 广州 510651
摘要:
使用45 μm白刚玉对YG6硬质合金样品进行微喷砂预处理后，利用阳极层流型气体离子源和非平衡磁控溅射复合技术制备梯度过渡类金刚石薄膜。研究表明：优化的微喷砂预处理工艺能显著提高膜/基结合力，降低膜层的摩擦因数。文中通过对优化微喷砂预处理前后表面接触角成分和硬度的测试，以及制备出膜层的物相和微观结构的分析，进一步探讨了优化微喷砂预处理对类金刚石薄膜性能的影响。
关键词:  微喷砂  硬质合金  类金刚石薄膜  膜/基结合力  摩擦因数
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Effects on Structure and Performance of Diamondlike Carbon Films deposited on Cemented Carbide by Microblasting Pretreatment
HU Fang, DAI Ming-jiang, LIN Song-sheng
Guangdong General Research Institute of Industrial Technology, Guangzhou Research Institute of Nonferrous Metals, Guangzhou 510651
Abstract:
Cemented carbides YG6 were pretreated by microblasting using white alundum abrasive of 45 μm, subsequently a gradient transition DLC film was deposited on by composite technique of anode laminar flow gas ion source and unbalanced magnetron sputtering. The surface contact angle, composition, phase and microstructure of samples before and after mircoblasting pretreatment were tested and analyzed. The results indicated that a significantly increased film adhesion strength and decreased frictional coefficient could be obtained by optimized microblasting pretreatment. The effects of microblasting pretreatment on property of DLC film were further discussed.
Key words:  microblasting  cemented carbides  DLC film  adhesion strength  friction coefficient
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