引用本文:陈涛,王泽松,周霖,邓建伟,田灿鑫,何俊,刘传胜,付德君.用于发动机活塞环表面涂层的CrN薄膜[J].中国表面工程,2010,(3):102~105
CHEN Tao,WANG Ze-song,ZHOU Lin,DENG Jian-wei,TIAN Can-xin,HE Jun,LIU Chuan-sheng,FU De-jun.CrN Films for Surface Coatings of Engine Piston Rings[J].China Surface Engineering,2010,(3):102~105
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用于发动机活塞环表面涂层的CrN薄膜
陈涛,王泽松,周霖,邓建伟,田灿鑫,何俊,刘传胜,付德君
武汉大学,加速器实验室,武汉,430072?
摘要:
设计了一套电子源辅助中频孪生非平衡磁控溅射装置,在单晶硅、高速钢、硬质合金衬底上制备了CrN,研究了气体流量、衬底偏压、溅射功率对薄膜结构和性能的影响.X射线衍射表明,在N2/(N2+Ar)比例低于60 %时,CrN薄膜呈明显的 (200) 结构,当N2/(N2+Ar)高于60 %时,出现含Cr2N的多晶结构.沉积速率在8.5～12.5 mm/h之间,显微硬度为10～18 GPa.衬底偏压对沉积速率、薄膜结构和显微硬度都有重要影响.在较低偏压下得到的薄膜以CrN(200)为主;在较高偏压下出现(200)和(111)相.AFM和SEM测试表明,在较低偏压下沉积的样品呈纤维状微结构,在Vb>25 V时,样品呈现柱状结构.CrN涂层的沉积速率和力学性能基本达到了发动机活塞环表面涂层的要求.
关键词:  中频磁控溅射  活塞环
DOI：
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基金项目:工信部国家重大专项资助2009ZX04012-032
CrN Films for Surface Coatings of Engine Piston Rings
CHEN Tao,WANG Ze-song,ZHOU Lin,DENG Jian-wei,TIAN Can-xin,HE Jun,LIU Chuan-sheng,FU De-jun
Accelerator Laboratory, Department of Physics, Wuhan University, Wuhan 430072
Abstract:
CrN coatings were deposited on Si, high-speed steels and WC by electron source assisted medium-frequency magnetron sputtering. The influence of gas flow rate, negative bias voltage, and sputtering power on the structure and mechanical properties of CrN were studied. X–ray diffraction showed that CrN coatings deposited at N2/(N2+Ar) ratios below 60% were polycrystalline with a CrN (200) orientation whereas those prepared at higher N2/(N2+Ar) ratios showed Cr2N structure. The deposition rate of CrN was in the range of 8.5～12.5 mm/h and their microhardness was in the range of 10～18 GPa. The deposition rate, structure, and microhardness of the coatings were strongly influenced by the negative bias voltage. At bias voltage lower than 25 V both CrN (200) and (111) were observed. AFM and SEM showed that the samples exhibited a fibrous structure, whereas at bias voltage exceeding 25 V the samples showed a columnar structure. The results showed that the CrN film prepared by the present process is suitable for application on piston rings of engines.
Key words:  CrN  middle–frequency magnetron sputtering  piston rings
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