| 引用本文: | 汤宝寅,王浪平,曾照明,王小峰,甘孔银,于永澔.窄脉冲保形全方位离子注入技术[J].中国表面工程,2004,(1):10~15 |
| .Narrow Pulse Conformality All Directions Ion Implantation Technique[J].China Surface Engineering,2004,(1):10~15 |
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| 摘要: |
| 叙述了全方位离子注入过程中，由于被处理零件与其周围离子鞘层之间厚度的增加，引起零件与鞘层之间保形性变差，导致零件表面注入剂量不均匀性；文中系统分析了注入电压、等离子体密度、脉冲宽度和脉冲频率等处理工艺参数对注入剂量不均匀性的影响，用鞘层动力学计算机数值模拟方法从理论上研究了轴承内外圈处理中工艺参数对注入剂量不均匀性的影响，并用实验方法进行了测量验证，理论研究和试验测量结果的一致性，说明所提出的窄脉冲保形全方位离子注入技术完全适用于复杂形状零件表面均匀强化处理。 |
| 关键词: 等离子体浸没离子注入 全方位离子注入 注入剂量不均匀性 保形性 |
| DOI： |
| 分类号:TG174.444 |
| 基金项目:总装备部"十五"预研项目基金资助(2002年) |
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| Narrow Pulse Conformality All Directions Ion Implantation Technique |
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TANG Bao-yin WANG Lang-ping ZENG Zhao-ming WANG Xiao-feng GAN Kong-yin YU Yong-hao
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| Abstract: |
| It was described in this paper that increase of the thickness between the treated part and its sheath caused the worse conformality, resulting in non-uniformity of implantation dose on the surface of treated part. The effect of processing technique parameters of implantation: voltage, plasma density, pulse duration and pulse frequency, on implantation dose non-uniformity was theoretically studied by sheath dynamics computer numerical modeling, and was experimentally measured. The consistence between the theoretical and experimental results proved that the narrow pulse conformality all directions ion implantation technique is completely suitable to surface treatment of complex-shaped spare parts. |
| Key words: Plasma immersion ion implantation,All directions ion implantation,implantation dose non-uniformity,Conformality |
