引用本文:张泰华,刘东旭,郇勇,王秀兰.基体对氮化钛膜的微力学和摩擦性能的影响[J].中国表面工程,2003,(4):23~26
.Effects of Different Substrates on Micromechanical and Tribology Properties of TiN Films[J].China Surface Engineering,2003,(4):23~26
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基体对氮化钛膜的微力学和摩擦性能的影响
张泰华,刘东旭,郇勇,王秀兰
作者单位
摘要:
采用等离子电弧沉积法分别在GT35和40CrNiMo钢上沉积厚约为0．5μm的TiN膜。为了检测成膜质量，在较宽的载荷范围内分别使用显微硬度、纳米压痕和纳米划痕技术表征钢基材和TiN／基材的微力学和摩擦性能。同TiN／40CrNiMo相比，TiN／GT35的硬度高和固体润滑效果显著，GT35是较为理想的基体材料。对这种亚微米厚的膜，纳米压痕技术和纳米划痕技术能提供丰富的近表面的弹塑性变形、断裂和摩擦等的信息。
关键词:  氮化钛 显微硬度 纳米硬度 固体润滑
DOI：
分类号:TG174.444 O484
基金项目:国家自然科学基金资助项目(10242001和10172086);中国科学院知识创新工程重要方向项目KJCX2-SW-L2
Effects of Different Substrates on Micromechanical and Tribology Properties of TiN Films
ZHANG Tai-hua1  LIU Dong-xu1  HUAN Yong1  WANG Xiu-lan2
Abstract:
TiN coatings with 0.5mm thickness were deposited by plasma arc deposition method on GT35 and 40CrNiMO steels. The qualities of TiN coating on different steels, including Vickers indentation, nanoindentation and nanoscratch were examined with different tips on a broad range of applied load. Micromechanical and tribology behaviors of these thin coatings were investigated and interpreted. Compared with TiN/40CrNiMo, the hardness and solid lubricating effects for TiN/GT35 were more significant. GT35 was a better substrate for TiN films. It was demonstrated that nanoindentation and nanoscratch tests can provide more information about the near-surface elastic-plastic deformation, fracture an friction properties.
Key words:  TiN films,micro-hardness,nano-hardness,solid lubricating
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