| 引用本文: | 陈天星，张向军，孟永钢.原子力显微镜摩擦力标定的改进楔形法[J].中国表面工程,2011,24(4):70~75 |
| CHEN Tian–xing, ZHANG Xiang–jun, MENG Yong–gang.Improved Wedge Method of the AFM Friction Force Calibration[J].China Surface Engineering,2011,24(4):70~75 |
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| 摘要: |
| 原子力显微镜（AFM）摩擦力的标定是利用AFM测量微载荷下表面间摩擦力需要解决的一个难题。传统的Ogletree楔形标定法没有考虑表面黏着力对摩擦力的影响，当载荷较小时，标定出的摩擦因数与真实值相比偏小。文中在Ogletree法的基础上，推导出一种原子力显微镜摩擦力标定的改进楔形法。利用改进楔形法，分别在标准光栅和聚焦离子束刻蚀（FIB）加工出的斜坡样品上对摩擦力进行了标定。试验结果表明，与常用的标准光栅相比，利用聚焦离子束刻蚀出的样品能够得到更多的有效数据，标定结果更为准确。将改进楔形法和Ogletree法的标定结果进行了比较，结果表明，在载荷较低时（<6 μN），改进楔形法更为准确；载荷较高时（>6 μN），Ogletree法与改进楔形法得到的结果相近。改进楔形法是一种更为准确的原子力显微镜摩擦力标定的方法。 |
| 关键词: 原子力显微镜 摩擦力标定 楔形标定法 聚焦离子束刻蚀 |
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| 基金项目:国家自然科学基金(50975154, 50730007)；国家“973”计划 (2007CB607604) |
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| Improved Wedge Method of the AFM Friction Force Calibration |
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CHEN Tian–xing, ZHANG Xiang–jun, MENG Yong–gang
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State Key Laboratory of Tribology, Tsinghua University, Beijing 100084
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| Abstract: |
| The friction force calibration of the atomic force microscopy (AFM) is a major problem for the friction force measurement between surfaces under micro load with AFM. The traditional Ogletree wedge method ignores the influence of the surface adhesion force on the friction which will result in a smaller fiction coefficient when the applied load is relatively smaller. An improved wedge method of the AFM friction force calibration is derived in this paper. With the improved wedge method, the friction force calibration is conducted on a standard grating and the slop fabricated by focused ion beam (FIB) method respectively. Comparing with the commonly used standard grating, the slop made by FIB can afford more effective data. So the calibration result is more accurate. The calibration result obtained with the improved wedge method and that with the Ogletree method are compared. The result shows that under a relatively smaller load (<6 μN), the improved wedge method is more accurate; under a higher load (>6 μN), the results obtained by the two methods are closed to each other. The improved wedge method is a more accurate AFM friction force calibration method. |
| Key words: atomic force microscopy friction calibration wedge method focused ion beam |
