引用本文:王永军，李红轩，吉利，刘晓红，吴艳霞，周惠娣，陈建敏.非平衡磁控溅射沉积类石墨碳膜结构及其摩擦学性能[J].中国表面工程,2011,24(3):17~22
WANG Yong-jun, LI Hong-xuan, JI Li, LIU Xiao-hong, WU Yan-xia, ZHOU Hui-di, CHEN Jian-min.Microstructure and Tribological Properties of Graphitelike Carbon Film Prepared by Unbalanced Magnetron Sputtering[J].China Surface Engineering,2011,24(3):17~22
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非平衡磁控溅射沉积类石墨碳膜结构及其摩擦学性能
王永军，李红轩，吉利，刘晓红，吴艳霞，周惠娣，陈建敏1,2
1. 中国科学院兰州化学物理研究所 固体润滑国家重点实验室,兰州 730000;2. 中国科学院北京研究生院，北京 100049
摘要:
利用非平衡磁控溅射技术在单晶硅基底上沉积了类石墨非晶碳膜。利用X射线光电子光谱、Raman光谱、高分辨透射电子显微镜及原子力显微镜对沉积薄膜的微观结构进行了详细表征；利用纳米压痕仪和球盘摩擦试验机分别对其力学性能和摩擦学性能进行了测试。结果表明，当前制备的非晶碳膜中sp2杂化碳占主导呈现出类石墨特征，但薄膜硬度可达14.2 GPa。大气环境中的摩擦性能测试表明，所制备的类石墨非晶薄膜具有优异的摩擦学性能：其承载能力高达2.8 GPa，同时具有较低摩擦因数（～0.05）和磨损率（～10-11cm3/Nm）。类石墨碳膜优异的摩擦学性能主要归因于其独特的结构、较低的内应力及良好的热稳定性。
关键词:  类石墨碳膜  磁控溅射  摩擦磨损
DOI：
分类号:
基金项目:国家自然科学基金（50705093, 50575217）；创新群体基金（50421502）；国家“973”计划（2007 CB607601）
Microstructure and Tribological Properties of Graphitelike Carbon Film Prepared by Unbalanced Magnetron Sputtering
WANG Yong-jun, LI Hong-xuan, JI Li, LIU Xiao-hong, WU Yan-xia, ZHOU Hui-di, CHEN Jian-min1,2
1. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000;2. Graduate University of the Chinese Academy of Sciences, Beijing 100049
Abstract:
Graphitelike carbon film was deposited on silicon substrates by unbalanced magnetron sputtering. The microstructure of the resultant film was characterized by Xray photonelectron spectroscopy, Raman spectroscopy, high resolution transmission electron microscopy and atomic force microscopy. Mechanical and tribological properties of the film were investigated by Nanoindentation and tribometer. The results show that the present film is dominated by sp2 sites, but it displays a moderately high hardness 14.2 GPa. Tribological tests in humid atmosphere demonstrates that the deposited graphitelike carbon film has a superior tribological properties, including high load bearing capacity (～2.8 GPa), low friction coefficient (～0.05) and wear (～10-11cm3/Nm). The superior tribological properties of the graphitelike carbon film are mainly attributed to its unique structure, low internal stress as well as high thermal stability.
Key words:  graphitelike carbon film  microstructure  tribological properties
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