| 引用本文: | 王 玲，余志明，魏秋平，田孟昆，王志辉.不同过渡层对钢基金刚石薄膜的影响[J].中国表面工程,2011,24(1):33~39 |
| WANG Ling, YU Zhing–ming, WEI Qiu–ping,TIAN Meng–kun, WANG Zhi–hui.Investigation of Diamond Films Deposition on Steel Substrates with Different Interlayers[J].China Surface Engineering,2011,24(1):33~39 |
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| 摘要: |
| 采用超高真空热丝化学气相沉积（HFCVD）系统，以甲烷和氢气为反应气体，在高速钢W18Cr4V基体上利用3种不同的过渡层（WC、Cr、WC/Cr）制备金刚石薄膜。采用场发射扫描电子显微镜(FE–SEM)、X射线衍射仪(XRD)、显微激光拉曼光谱仪（Raman）以及洛氏硬度计对过渡层和金刚石薄膜进行检测分析，研究了不同过渡层对金刚石薄膜形貌质量和附着性能的影响。结果表明，3种过渡层均可以有效减少钢基中Fe对金刚石薄膜的负面影响，提高金刚石的形核率；其中，采用WC/Cr过渡层时膜基间残余应力最小，仅为0.25 Gpa，附着性能最好。 |
| 关键词: 金刚石薄膜 高速钢 过渡层 化学气相沉积 附着性能 |
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| 基金项目:粉末冶金国家重点实验室开放基金（2008112048）；湖南省研究生创新基金（1343–74236000005）；中南大学贵重仪器开放共享基金（ZKJ2008001） |
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| Investigation of Diamond Films Deposition on Steel Substrates with Different Interlayers |
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WANG Ling, YU Zhing–ming, WEI Qiu–ping,TIAN Meng–kun, WANG Zhi–hui
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School of Materials Science and Engineering, Central South University
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| Abstract: |
| Diamond films were deposited on high–speed steel (HSS) substrates pre–coated with different interlayers（WC, Cr and WC/Cr）by hot filament chemical vapour deposition (HFCVD). The surface morphology, film quality and interface structure of the diamond films were characterised by scanning electron microscopy (SEM), micro–raman spectroscopy and X–ray diffractometry (XRD), respectively. The adhesion of the diamond films was measured by Rockwell hardness tester. The results show that with the WC, Cr and WC/Cr interlayer, the high quality, low residual stress and high nucleation density of diamond film are achieved on the HSS substrates. As determined from Raman spectra, furthermore, the films with WC/Cr interlayer are under the lowest compressive stress, σ ≤0.25 GPa, showing a best adhesion. |
| Key words: diamond films high–speed steel substrates interlayers chemical vapour deposition adhesion |
