引用本文:李金龙,冒守栋,孙科沸,宋振纶.氮分压对钕铁硼表面直流磁控溅射沉积AlN/Al防护涂层结构和性能的影响[J].中国表面工程,2010,(3):80~83
LI Jin-long,MAO Shou-dong,SUN Ke-fei,SONG Zhen-lun.Effect of Nitrogen Partial Pressure on Structure and Properties of AlN/Al Protective Coatings on NdFeB by DC Magnetron Sputtering[J].China Surface Engineering,2010,(3):80~83
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氮分压对钕铁硼表面直流磁控溅射沉积AlN/Al防护涂层结构和性能的影响
李金龙,冒守栋,孙科沸,宋振纶
中国科学院,宁波材料技术与工程研究所,宁波,315201?
摘要:
采用直流磁控溅射在钕铁硼表面沉积AlN/Al双层防护薄膜来提高磁体的耐腐蚀性能.先在基体表面沉积纯Al薄膜,然后沉积外层AlN薄膜.沉积AlN薄膜时,改变氮气分压,研究氮分压对薄膜结构和耐腐蚀性能的影响.结果显示,AlN纳米颗粒形成于内层Al结晶体表面.氮氩分压比为1:1时,钕铁硼表面形成了更致密的AlN/Al薄膜.膜基界面存在元素的互扩散和冶金结合.氮氩分压为1:1的AlN/Al防护薄膜具有最好的耐腐蚀性能.
关键词:  AlN/Al膜  结构  腐蚀性能
DOI：
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基金项目:中国博士后基金(20090450737)；浙江省自然科学基金（Y4090178）
Effect of Nitrogen Partial Pressure on Structure and Properties of AlN/Al Protective Coatings on NdFeB by DC Magnetron Sputtering
LI Jin-long,MAO Shou-dong,SUN Ke-fei,SONG Zhen-lun
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201
Abstract:
In order to improve the corrosion resistance of NdFeB, AlN/Al dual protective coatings were synthesized by DC magnetron sputtering. To deposit the outmost AlN layer, the nitrogen/argon mixture gas was introduced into the chamber with the ratio of 2:1, 1:1 and 1:2 for argon to nitrogen. AlN with nano–size particles forms on the inner Al crystal and the nitrogen partial pressure of 50 % leads to a denser AlN/Al coatings on NdFeB. In the interface layer between the coating and NdFeB substrate, there are a diffusion distribution and occurrence of the interfacial reaction and metallurgy bonding. At the nitrogen partial pressure of 50 %, the AlN/Al coated NdFeB has the best corrosion resistance.
Key words:  NdFeB  AlN/Al coatings  structure  corrosion property
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