| 引用本文: | 张栋,孙丽丽,郑贺,汪爱英.直流反应磁控溅射CrNX功能装饰涂层的研究[J].中国表面工程,2010,(3):38~41 |
| ZHANG Dong,SUN Li-li,ZHENG He,WANG Ai-ying.Study of Magnetron Reactive Sputtering CrNX Decoration Films with Functional Protection[J].China Surface Engineering,2010,(3):38~41 |
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| 摘要: |
| 采用反应磁控溅射制备不同氮气流量下的CrNX膜,观察薄膜颜色的变化,采用球盘式摩擦磨损仪、台阶仪、金相显微镜测试薄膜的耐磨性能,并采用X射线衍射技术、场发射扫描电镜观测薄膜的相成份以及微观形貌.研究结果表明,随着氮气含量的增加,薄膜颜色由银灰色逐渐过渡为深灰色,薄膜相结构由单相Cr2N转变为Cr2N和CrN混合相继而转变为单相CrN,当氮气流量为20 cm3·min-1以及30 cm3·min-1时薄膜表现出良好的耐磨性.采用高氮气流量的工艺镀中间层,低氮气流量的工艺镀表面层,复合薄膜的耐磨性大幅度提高,同时能够获得美观的银灰色外观. |
| 关键词: 反应磁控溅射 CrNX 耐磨性 |
| DOI： |
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| 基金项目:浙江省科技攻关项目（2008C21055）；浙江省重大科技专项（2009C11SA550048） |
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| Study of Magnetron Reactive Sputtering CrNX Decoration Films with Functional Protection |
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ZHANG Dong,SUN Li-li,ZHENG He,WANG Ai-ying
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Ningbo Institute of Material Technology & Engineering Chinese Academy of Sciences, Ningbo Zhejiang 315201
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| Abstract: |
| CrNX films were deposited by direct current reactive magnetron sputtering at various nitrogen flow rates. Color of the films was investigated, the tribological properties, phase composition and surface morphology of the CrNX films were investigated by pin on disk system，step–height tester, metallurgical microscope, XRD ,and SEM. The results showed that，as the increase of nitrogen flow rates, the film color changed from silver gray to dark gray, phase composition transformation from Cr2N to mixture of Cr2N and CrN then to CrN single–phase. The CrNx films deposited at the N2 flux of 20 cm3?min-1 and 30 cm3?min-1 exhibit good wear resistance. Multilayered films which exhibit good wear resistance and had silver gray color for decoration were composed of a low nitrogen flux buffer layer and a high nitrogen flux surface layer. |
| Key words: reactive magnetron sputtering CrNX wear resistance |
