| 摘要: |
| 大面积光学级金刚石自支撑膜的制备和加工是近年来在CVD金刚石研究领域的最重要的技术进展之一;在军事和民用光学领域有非常重要的应用前景.综述了北京科技大学近年来在CVD金刚石膜光学应用领域的研究进展;给出了采用高功率直流电弧等离子体喷射(DC Arc Plasma Jet) CVD工艺制备大面积光学级金刚石自支撑膜的研究结果;对所制备的光学级金刚石自支撑膜的光学、力学(机械)、热学、微波介电性能、抗氧化、抗热震、抗砂蚀和抗激光损伤等方面的最新研究结果,及其在高新技术领域中的应用前景及前沿问题进行了讨论. |
| 关键词: 光学级金刚石膜 制备和加工 物理化学性能 应用前景 |
| DOI： |
| 分类号: |
| 基金项目:国家自然科学基金资助（50572007, 50872010） |
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| Large Area Optical Grade Freestanding Diamond Films: Deposition,Characterization and High Technology Application Prosperous |
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LU Fan-xiu
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School of Materials Science & Technology, University of Science and Technology Beijing, Beijing 100083
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| Abstract: |
| The deposition and fabrication of large area optical grade freestanding diamond films is one of the most significant progresses in the research field of CVD diamond films. The present paper reviews the recent progresses in this particular field made by the University of Science and Technology Beijing. Results on the preparation of large area freestanding diamond films by high power DC Arc Plasma Jet CVD are presented. Detailed results on the optical, thermal, mechanical, dielectric, oxidation resistance, thermal shock resistance, sand erosion resistance, and laser damage threshold, the prosperous and frontier issues in high technology applications of the resultant freestanding films are discussed. |
| Key words: freestanding diamond films optical grade deposition and fabrication physical and chemical properties application prospects |
